SOLUTIONS
GBS has partnered with strategic manufacturers to meet the strenuous demands of semiconductor processes, which often involve corrosive chemicals, plasma, and high temperatures. Our advanced sealing solutions play a crucial role in maintaining the integrity of these processes.
Our sealing solutions are designed with enhanced durability as the main attribute. Not only can they withstand the harsh elements, they possess a longer product lifespan than its counterparts in the market based on some tests conducted in the field.
O-Rings
O-rings are one of the common seals used in the semiconductor industry; which exposes to diverse harsh environments from extreme temperatures, aggressive plasma to corrosive chemicals.
Partnering with EKK, the Superior Series advantage starts with our super-premium base polymers and the expertise to perfect them.
The benefits of our streamlined process are unequalled focus and efficiency, from base polymer manufacturing to compounding and moulding.
This results in cost-effective sealing solutions with exceptional cleanliness throughout the manufacturing process.
Benefits
- Extended product life expectancy
- Excellent extreme temperature resistance
- High plasma resistance
- High corrosive chemicals resistance
- Low outgas generation
- Improved production focus and efficiency
- Cost effectiveness across every manufacturing stage
Bonded Doors/Gates
Bonded Door is an enhancement option over the O-ring when it comes to dynamic applications.
Used in semiconductor processing, Bonded Door (from EKK) increases the life expectancy and enhances the performance of the door’s seal. The seal, made from perfluoroelastomer or Fluorcarbon compound, is bonded to an aluminium or stainless steel door.
Benefits
- Extended product life expectancy
- Improved sealing performance
- Improved production focus and efficiency
- Lower cost
- Negligible leakage/ contamination
Magnetic Fluid Vacuum Seal
Used widely in the Semiconductor industry, the Magnetic Fluid Vacuum Seal is a clean seal which retains magnetic fluid around a rotary shaft by using magnets.
EKK’s vacuum seal is best for Semiconductor manufacturing equipment and flat panel display manufacturing equipment. It is also used as a dust seal for bearings of conveying robots.
Benefits
- Excellent thermal resistance (up to 200 oC)
- High vacuum resistance
- No need for lubricants
- Extended product life expectancy
- Improved sealing performance
- Negligible leakage/ contamination
Common Problems Faced
- Low product life span resulting in frequent change of parts
- Less than optimal throughput yield
- Frequent asset breakdown / unscheduled downtime
- Exposure to corrosive chemicals and extreme conditions
Facing similar problems? Connect with us for a personal consultation and how we can meet your needs.